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Measurements
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Measurements

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Available measurements for PQC. {: .fs-6 .fw-300 }

Table of contents

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  • TOC {:toc}

IV Ramp

IV ramp using HV Source as source and for taking current measurements.

Type: iv_ramp

Parameters

Parameter Type Default Description
matrix_enable bool false Enable matrix configuration.
matrix_channels list [] List of matrix channels to be closed. All matrix slots can be addressed.
voltage_start volt required Start voltage for HV Source ramp. (-1 kV to 1 kV).
voltage_stop volt required End voltage for HV Source ramp. (-1 kV to 1 kV).
voltage_step volt required Step voltage for HV Source ramp (1 mV to 100 V).
waiting_time second 1 s Additional waiting time between ramp steps (100 ms to 3600 s).
hvsrc_current_compliance ampere required HV Source current compliance (1 nA to 1 mA).
hvsrc_sense_mode str local HV Source sense mode. Possible values are: local, remote.
hvsrc_route_terminal str rear HV Source route terminal. Possible values are: front, rear.
hvsrc_filter_enable bool false Enable HV Source filter.
hvsrc_filter_count int 10 HV Source filter count (1 to 100).
hvsrc_filter_type str moving Type of applied HV Source filter. Possible values are: moving, repeat.
hvsrc_source_voltage_autorange_enable bool true Enable source voltage auto range.
hvsrc_source_voltage_range volt 20 V Set source voltage range. (-1 kV to 1 kV).
analysis_functions list [] List of applied analysis functions. Possible values are: iv, gcd, fet, contact, meander, breakdown.

Data columns

Column Type Description
timestamp second Time offset in seconds.
voltage volt Voltage assigned to HV source.
current_hvsrc ampere Current reading of HV source.
temperature_box degC Box temperature in degree Celcius.
temperature_chuck degC Chuck temperature in degree Celcius.
humidity_box percent Relative box humidity in percent.

Example configuration

- id: iv_example
  name: IV Example
  type: iv_ramp
  enabled: true
  description: An example measurement.
  parameters:
      matrix_enable: true
      matrix_channels: [1A02, 2C11]
      voltage_start: 0 V
      voltage_stop: -1000 V
      voltage_step: 10 V
      waiting_time: 1 s
      current_compliance: 1 uA
      sense_mode: local
      route_terminal: rear
      hvsrc_filter_enable: true
      hvsrc_filter_count: 10
      hvsrc_filter_type: moving
      analysis_functions: [iv]

IV Ramp with Electrometer

IV ramp using HV Source and Electrometer for measurements.

Type: iv_ramp_elm

Parameters

Parameter Type Default Description
matrix_enable bool false Enable matrix configuration.
matrix_channels list [] List of matrix channels to be closed. All matrix slots can be addressed.
voltage_start volt required Start voltage for HV Source ramp. (-1 kV to 1 kV).
voltage_stop volt required End voltage for HV Source ramp. (-1 kV to 1 kV).
voltage_step volt required Step voltage for HV Source ramp (1 mV to 100 V).
waiting_time second 1 s Additional waiting time between ramp steps (100 ms to 3600 s).
hvsrc_current_compliance ampere required HV Source current compliance (1 nA to 1 mA).
hvsrc_sense_mode str local HV Source sense mode. Possible values are: local, remote.
hvsrc_route_terminal str rear HV Source route terminal. Possible values are: front, rear.
hvsrc_filter_enable bool false Enable HV Source filter.
hvsrc_filter_count int 10 HV Source filter count (1 to 100).
hvsrc_filter_type str repeat Type of applied HV Source filter. Possible values are: moving, repeat.
hvsrc_source_voltage_autorange_enable bool true Enable source voltage auto range.
hvsrc_source_voltage_range volt 20 V Set source voltage range. (-1 kV to 1 kV).
elm_filter_enable bool false Enable Electrometer filter.
elm_filter_count int 10 Electrometer filter count (1 to 100).
elm_filter_type str repeat Type of applied Electrometer filter. Possible values are: moving, repeat.
elm_current_range ampere 20 pA Current range for measurements.
elm_current_autorange_enable bool False Enable current auto range.
elm_current_autorange_minimum ampere 20 pA Lower current limit for auto range.
elm_current_autorange_maximum ampere 20 mA Upper current limit for auto range.
elm_zero_correction bool false Perform Electrometer zero correction.
elm_integration_rate int 50 Electrometer integration rate (50 or 60).
elm_read_timeout second 60 s Timeout for read operation.
analysis_functions list [] List of applied analysis functions. Possible values are: iv, gcd, fet, contact, meander, breakdown.

Data columns

Column Type Description
timestamp second Time offset in seconds.
voltage volt Voltage assigned to HV source.
current_hvsrc ampere Current reading of HV source.
current_elm ampere Current reading of electrometer.
temperature_box degC Box temperature in degree Celcius.
temperature_chuck degC Chuck temperature in degree Celcius.
humidity_box percent Relative box humidity in percent.

Example configuration

- id: iv_example
  name: IV Example
  type: iv_ramp_elm
  enabled: true
  description: An example measurement.
  parameters:
      matrix_enable: true
      matrix_channels: [1A02, 2C11]
      voltage_start: 0 V
      voltage_stop: -1000 V
      voltage_step: 10 V
      waiting_time: 1 s
      hvsrc_current_compliance: 1 uA
      hvsrc_sense_mode: local
      hvsrc_route_terminal: rear
      hvsrc_filter_enable: false
      hvsrc_filter_count: 10
      hvsrc_filter_type: repeat
      elm_filter_enable: false
      elm_filter_count: 10
      elm_filter_type: repeat
      elm_zero_correction: false
      elm_integration_rate: 50
      analysis_functions: [iv]

IV Ramp 4-Wire

IV ramp using V Source for ramp and measurements.

Type: iv_ramp_4_wire

Parameters

Parameter Type Default Description
matrix_enable bool false Enable matrix configuration.
matrix_channels list [] List of matrix channels to be closed. All matrix slots can be addressed.
current_start ampere required Start current for V Source ramp. (-250 mA to 250 mA).
current_stop ampere required End current for V Source ramp. (-250 mA to 250 mA).
current_step ampere required Step current for V Source ramp (1 nA to 250 mA).
waiting_time second 1 s Additional waiting time between ramp steps (100 ms to 3600 s).
vsrc_current_compliance volt required V Source current compliance (1 mV to 1000 V).
vsrc_sense_mode str local V Source sense mode. Possible values are: local, remote.
vsrc_route_terminal str rear V Source route terminal. Possible values are: front, rear.
vsrc_filter_enable bool false Enable V Source filter.
vsrc_filter_count int 10 V Source filter count (1 to 100).
vsrc_filter_type str repeat Type of applied V Source filter. Possible values are: moving, repeat.
analysis_functions list [] List of applied analysis functions. Possible values are: iv, van_der_pauw, cross, linewidth, cbkr, contact, meander, breakdown.

Data columns

Column Type Description
timestamp second Time offset in seconds.
current ampere Current assigned to V source.
voltage_vsrc volt Voltage reading of V source.
temperature_box degC Box temperature in degree Celcius.
temperature_chuck degC Chuck temperature in degree Celcius.
humidity_box percent Relative box humidity in percent.

Example configuration

- id: 4wire_example
  name: IV 4-Wire Example
  type: iv_ramp_4_wire
  enabled: true
  description: An example measurement.
  parameters:
      matrix_enable: true
      matrix_channels: [2D12, 2E09, 2F10, 2G11]
      current_start: -10 uA
      current_stop: 10 uA
      current_step: 500 nA
      waiting_time: 500 ms
      vsrc_voltage_compliance: 20 V
      vsrc_sense_mode: remote
      vsrc_filter_enable: false
      vsrc_filter_count: 10
      vsrc_filter_type: repeat
      analysis_functions: [iv, van_der_pauw]

IV Ramp with Bias

Type: iv_ramp_bias

Parameters

Parameter Type Default Description
matrix_enable bool false Enable matrix configuration.
matrix_channels list [] List of matrix channels to be closed. All matrix slots can be addressed.
voltage_source str vsrc Possible values are: hvsrc, vsrc.
voltage_start volt 0
voltage_stop volt -100 V
voltage_step volt 10 V
bias_voltage_source str hvsrc Possible values are: hvsrc, vsrc.
bias_voltage_start volt 10 V
bias_voltage_stop volt -90 V
hvsrc_current_compliance volt required HV Source current compliance.
hvsrc_sense_mode str local HV Source sense mode. Possible values are: local, remote.
hvsrc_route_terminal str rear HV Source route terminal. Possible values are: front, rear.
hvsrc_filter_enable bool false Enable HV Source filter.
hvsrc_filter_count int 10 HV Source filter count (1 to 100).
hvsrc_filter_type str repeat Type of applied HV Source filter. Possible values are: moving, repeat.
hvsrc_source_voltage_autorange_enable bool true Enable source voltage auto range.
hvsrc_source_voltage_range volt 20 V Set source voltage range. (-1 kV to 1 kV).
vsrc_current_compliance volt required V Source current compliance.
vsrc_sense_mode str local Possible values are: local, remote.
vsrc_filter_enable bool false
vsrc_filter_count int 10
vsrc_filter_type str repeat Possible values are: moving, repeat.
analysis_functions list [] List of applied analysis functions. Possible values are: iv, gcd, fet, contact, meander, breakdown.

Data columns

Column Type Description
timestamp second Time offset in seconds.
voltage volt Voltage assigned to HV source.
current_hvsrc ampere Current reading of HV source.
bias_voltage volt Bias voltage assigned to V source.
temperature_box degC Box temperature in degree Celcius.
temperature_chuck degC Chuck temperature in degree Celcius.
humidity_box percent Relative box humidity in percent.

Example configuration

- id: iv_bias_example
  name: IV Bias Example
  type: iv_ramp_bias
  enabled: true
  description: An example measurement.
  parameters:
      matrix_enable: false
      matrix_channels: []
      analysis_functions: [iv]

IV Ramp with Bias and Electrometer

Type: iv_ramp_bias_elm

Parameters

Parameter Type Default Description
matrix_enable bool false Enable matrix configuration.
matrix_channels list [] List of matrix channels to be closed. All matrix slots can be addressed.
voltage_source str vsrc Possible values are: hvsrc, vsrc.
voltage_start volt 0
voltage_stop volt -100 V
voltage_step volt 10 V
bias_voltage_source str hvsrc Possible values are: hvsrc, vsrc.
bias_voltage_start volt 10 V
bias_voltage_stop volt -90 V
hvsrc_current_compliance volt required HV Source current compliance.
hvsrc_sense_mode str local HV Source sense mode. Possible values are: local, remote.
hvsrc_route_terminal str rear HV Source route terminal. Possible values are: front, rear.
hvsrc_filter_enable bool false Enable HV Source filter.
hvsrc_filter_count int 10 HV Source filter count (1 to 100).
hvsrc_filter_type str repeat Type of applied HV Source filter. Possible values are: moving, repeat.
hvsrc_source_voltage_autorange_enable bool true Enable source voltage auto range.
hvsrc_source_voltage_range volt 20 V Set source voltage range. (-1 kV to 1 kV).
vsrc_current_compliance volt required V Source current compliance.
vsrc_sense_mode str local Possible values are: local, remote.
vsrc_filter_enable bool false
vsrc_filter_count int 10
vsrc_filter_type str repeat Possible values are: moving, repeat.
elm_filter_enable bool false Enable Electrometer filter.
elm_filter_count int 10 Electrometer filter count (1 to 100).
elm_filter_type str repeat Type of applied Electrometer filter. Possible values are: moving, repeat.
elm_current_range ampere 20 pA Current range for measurements.
elm_current_autorange_enable bool False Enable current auto range.
elm_current_autorange_minimum ampere 20 pA Lower current limit for auto range.
elm_current_autorange_maximum ampere 20 mA Upper current limit for auto range.
elm_zero_correction bool false Perform Electrometer zero correction.
elm_integration_rate int 50 Electrometer integration rate (50 or 60).
elm_read_timeout second 60 s Timeout for read operation.
analysis_functions list [] List of applied analysis functions. Possible values are: iv, gcd, fet, contact, meander, breakdown.

Data columns

Column Type Description
timestamp second Time offset in seconds.
voltage volt Voltage assigned to HV source.
current_elm ampere Current reading of electrometer.
current_vsrc ampere Current reading of V source.
current_hvsrc ampere Current reading of HV source.
bias_voltage volt Bias voltage assigned to V source.
temperature_box degC Box temperature in degree Celcius.
temperature_chuck degC Chuck temperature in degree Celcius.
humidity_box percent Relative box humidity in percent.

Example configuration

- id: iv_bias_example
  name: IV Bias Example
  type: iv_ramp_bias_elm
  enabled: true
  description: An example measurement.
  parameters:
      matrix_enable: false
      matrix_channels: []
      analysis_functions: [iv]

CV Ramp (HV Source)

CV ramp using HV Source and LCR for CpRp measurements.

Type: cv_ramp

Parameters

Parameter Type Default Description
matrix_enable bool false Enable matrix configuration.
matrix_channels list [] List of matrix channels to be closed. All matrix slots can be addressed.
bias_voltage_start volt required
bias_voltage_step volt required
bias_voltage_stop volt required
waiting_time second 1 s
hvsrc_current_compliance ampere 1 uA
hvsrc_route_terminal str rear
hvsrc_sense_mode str local Possible values are: local, remote.
hvsrc_filter_enable bool false
hvsrc_filter_count int 10
hvsrc_filter_type str repeat Possible values are: moving, repeat.
hvsrc_source_voltage_autorange_enable bool true Enable source voltage auto range.
hvsrc_source_voltage_range volt 20 V Set source voltage range. (-1 kV to 1 kV).
lcr_soft_filter bool true Apply software STD/mean<0.005 filter.
lcr_frequency herz 1 kHz Possible range from 1 Hz to 25 kHz.
lcr_amplitude volt 250 mV
lcr_integration_time str medium Possible values are: short, medium, long.
lcr_averaging_rate int 1 Possible range from 1 to 10.
lcr_auto_level_control bool true
lcr_open_correction_mode str single Possible values are: single, multi.
lcr_open_correction_channel int 0 Possible range from 0 to 127.
analysis_functions list [] List of applied analysis functions. Possible values are: cv, mos, capacitor.

Data columns

Column Type Description
timestamp second Time offset in seconds.
voltage_hvsrc volt Voltage assigned to HV source.
current_hvsrc ampere Current reading of HV source.
capacitance farad First value of Cp reading of LCR.
capacitance2 float Second value of Cp reading of LCR.
resistance ohm Resistance reading of LCR.
temperature_box degC Box temperature in degree Celcius.
temperature_chuck degC Chuck temperature in degree Celcius.
humidity_box percent Relative box humidity in percent.

Example configuration

- id: cv_example
  name: CV Example
  type: cv_ramp
  enabled: true
  description: An example measurement.
  parameters:
      matrix_enable: true
      matrix_channels: [1A01, 1B02, 2H11, 2G12]
      bias_voltage_start: -5 V
      bias_voltage_stop: 10 V
      bias_voltage_step: 0.1 V
      waiting_time: 100 ms
      hvsrc_current_compliance: 100 uA
      hvsrc_route_terminal: rear
      hvsrc_sense_mode: local
      hvsrc_filter_enable: false
      hvsrc_filter_count: 10
      hvsrc_filter_type: moving
      lcr_soft_filter: true
      lcr_frequency: 10 kHz
      lcr_amplitude: 250 mV
      lcr_integration_time: medium
      lcr_averaging_rate: 1
      lcr_auto_level_control: true
      lcr_open_correction_mode: multi
      lcr_open_correction_channel: 8
      analysis_functions: [cv]

CV Ramp (V Source)

CV ramp using V Source and LCR for CpRp measurements.

Type: cv_ramp_vsrc

Parameters

Parameter Type Default Description
matrix_enable bool false Enable matrix configuration.
matrix_channels list [] List of matrix channels to be closed. All matrix slots can be addressed.
bias_voltage_start volt required
bias_voltage_step volt required
bias_voltage_stop volt required
waiting_time second 1 s
vsrc_current_compliance ampere 1 uA
vsrc_sense_mode str local Possible values are: local, remote.
vsrc_filter_enable bool false
vsrc_filter_count int 10
vsrc_filter_type str repeat Possible values are: moving, repeat.
lcr_soft_filter bool true Apply software STD/mean<0.005 filter.
lcr_frequency herz 1 kHz Possible range from 1 Hz to 25 kHz.
lcr_amplitude volt 250 mV
lcr_integration_time str medium Possible values are: short, medium, long.
lcr_averaging_rate int 1 Possible range from 1 to 10.
lcr_auto_level_control bool true
lcr_open_correction_mode str single Possible values are: single, multi.
lcr_open_correction_channel int 0 Possible range from 0 to 127.
analysis_functions list [] List of applied analysis functions. Possible values are: cv, mos, capacitor.

Data columns

Column Type Description
timestamp second Time offset in seconds.
voltage_vsrc volt Voltage assigned to V source.
current_vsrc ampere Current reading of V source.
capacitance farad First value of Cp reading of LCR.
capacitance2 float Second value of Cp reading of LCR.
resistance ohm Resistance reading of LCR.
temperature_box degC Box temperature in degree Celcius.
temperature_chuck degC Chuck temperature in degree Celcius.
humidity_box percent Relative box humidity in percent.

Example configuration

- id: cv_example
  name: CV Example
  type: cv_ramp_vsrc
  enabled: true
  description: An example measurement.
  parameters:
      matrix_enable: true
      matrix_channels: [1A01, 1B02, 2H11, 2G12]
      bias_voltage_start: -5 V
      bias_voltage_stop: 10 V
      bias_voltage_step: 0.1 V
      waiting_time: 100 ms
      vsrc_current_compliance: 100 uA
      vsrc_sense_mode: local
      vsrc_filter_enable: false
      vsrc_filter_count: 10
      vsrc_filter_type: moving
      lcr_soft_filter: true
      lcr_frequency: 10 kHz
      lcr_amplitude: 250 mV
      lcr_integration_time: medium
      lcr_averaging_rate: 1
      lcr_auto_level_control: true
      lcr_open_correction_mode: multi
      lcr_open_correction_channel: 8
      analysis_functions: [cv]

CV Ramp (LCR only)

Type: cv_ramp_alt

Parameters

Parameter Type Default Description
matrix_enable bool false Enable matrix configuration.
matrix_channels list [] List of matrix channels to be closed. All matrix slots can be addressed.
bias_voltage_start volt required
bias_voltage_step volt required
bias_voltage_stop volt required
waiting_time second 1 s
lcr_soft_filter bool true Apply software STD/mean<0.005 filter.
lcr_frequency herz 1 kHz Possible range from 1 Hz to 25 kHz.
lcr_amplitude volt 250 mV
lcr_integration_time str medium Possible values are: short, medium, long.
lcr_averaging_rate int 1 Possible range from 1 to 10.
lcr_auto_level_control bool true
lcr_open_correction_mode str single Possible values are: single, multi.
lcr_open_correction_channel int 0 Possible range from 0 to 127.
analysis_functions list [] List of applied analysis functions. Possible values are: cv, mos, capacitor.

Data columns

Column Type Description
timestamp second Time offset in seconds.
voltage_lcr volt Voltage assigned to V source.
current_lcr ampere Current reading of V source.
capacitance farad First value of Cp reading of LCR.
capacitance2 float Second value of Cp reading of LCR.
resistance ohm Resistance reading of LCR.
temperature_box degC Box temperature in degree Celcius.
temperature_chuck degC Chuck temperature in degree Celcius.
humidity_box percent Relative box humidity in percent.

Example configuration

- id: cv_alt_example
  name: CV Alternate Example
  type: cv_ramp_alt
  enabled: true
  description: An example measurement.
  parameters:
      matrix_enable: true
      matrix_channels: [1A01, 1B02, 2H11, 2G12]
      bias_voltage_start: -5 V
      bias_voltage_stop: 10 V
      bias_voltage_step: 0.1 V
      waiting_time: 100 ms
      lcr_soft_filter: true
      lcr_frequency: 10 kHz
      lcr_amplitude: 250 mV
      lcr_integration_time: medium
      lcr_averaging_rate: 1
      lcr_auto_level_control: true
      lcr_open_correction_mode: multi
      lcr_open_correction_channel: 8
      analysis_functions: [cv]

Frequency Scan

Note: available in future releases.

Type: frequency_scan

Parameters

Parameter Type Default Description
matrix_enable bool false Enable matrix configuration.
matrix_channels list [] List of matrix channels to be closed. All matrix slots can be addressed.

Data columns

Column Type Description

Example configuration

- id: fscan_example
  name: Freq. Scan Example
  type: frequency_scan
  enabled: true
  description: An example measurement.
  parameters:
      matrix_enable: false
      matrix_channels: []